Detection method for the impact strength of a nano-piezoelectric resonant microcantilever

Abstract

In order to solve the problem of large deviation in the impact strength test results of the same nanomaterial, a test method for the impact strength of a nano-piezoelectric resonant microcantilever is proposed. The structure of the nano-piezoelectric resonant microcantilever is designed. The release and surface patterning of the cantilever are completed by using bulk silicon technology. The uncertainty in the impact strength of the cantilever is detected and analyzed. The experimental results show that the standard deviation S is large when the tool speed is low, and the dispersion of impact results is large when the tool speed is high. The impact strength of the sample prepared using a worn milling cutter is 82.7% of that prepared by a new milling cutter, and its standard deviation increases from 0.256 to 2.996.