Abstract
X-ray diffraction measurements on titanium nitride coatings prepared by the physical vapour deposition method in a magnetron were performed. The peak positions, intensities, integral breadths and shape parameters have been determined and related to layer characteristics (lattice parameters, texture, strain and domain size) for several sets of samples deposited under various conditions and also with different film thicknesses. In addition, the stress was measured by the X-ray method. A strong dependence of the lattice parameters and X-ray line broadening on the crystallographic direction as well as on the line asymmetry appeared systematically for certain deposition conditions. Interpretation of this effect is not clear and therefore detailed results are presented together with some possible reasons for such an anisotropy.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
