Abstract
Radio frequency (RF) plasma enhanced chemical vapour deposition (PECVD) technique was used to make a diamond like carbon (DLC) coating on silicon (100) substrate. The deposition was carried out using C2H2 as the process gas, at different temperatures, 25°C (room temperature) and 300°C with constant power and flow rate. Characterization techniques such as ellipsometry and Raman spectroscopy were used to characterize these samples. Raman analysis of DLC coatings at different temperature is carried out in detail for two different excitation wavelengths i.e. 514 and 785nm and, results are presented in the paper. Blue-shiftis observed in both D and G peaks of Raman spectrum with increase in deposition temperature, which indicates the formation of compressive strain in high temperature deposited DLC coatings. Dispersion in both D and G peaks is observed for different excitation wavelength suggesting that the coating is hydrogenated DLC. The degree of hydrogenation of the DLC coating appears to decrease with respect to the deposition temperature. Nano-indentation study shows a marginal increase in hardness with increase in deposition temperature.
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