Desorption and sputtering on solid surfaces by low-energy multicharged ions

Abstract

Desorption and sputtering on solid surfaces interacting with slow multicharged ions were studied by two different experimental methods: time-of-flight secondary ion mass spectrometry (TOF-SIMS) coupled with low-energy ion scattering spectroscopy (LEIS), and optical emission spectroscopy (OES) of secondary particles. Spectra reveal the anisotropic angular dependence of proton emission on an Al surface interacting with Arq+ (q = 8 and 14) ions at the incidence angle of ∼0.5° (tangential angle to the surface). Simultaneous spectra of a GaN surface, scattering Ar+ ions and scattering protons reveal the kinetic energy distribution of Ar6+ (15 keV, ∼10°) and the dependence of the protons on the kinetic energy of Ar+. Spectra of secondary particles, conducted on a Ti surface irradiated with Ar3+ ions (30 keV) at normal-incidence angle, reveal the mean velocity < v⊥ > of sputtered Ti* substrate atoms perpendicular to the surface, measured by analyzing intensity decay as a function of distance from the surface.