Designing MEMS accelerometer for enhanced sensitivity and reduced cross-sensitivity in landslide monitoring

Abstract

MEMS accelerometers capable of detecting weak motions are required in measuring landslide movements. The sensor’s sensitivity and its independent readings of various acceleration modes are crucial factors in the design of these sensors. In addition, it is highly desired to fabricate these sensors with low-cost and flexible manufacturing technologies such as surface micromachining. This paper presents an advanced topology optimization approach to design the suspended structure for the maximum level of sensitivity and for a low cross-sensitivity in the reading of principal and lateral modes, while it is manufacturable with a low-cost surface micromachining process. The effect of inertial forces as a variable loading condition and mode switch prevention is applied using a meta-heuristic topology optimization method with simulated annealing. Considering the unique results of this topology optimization, PolyMUMPs surface micromachining is employed to manufacture the developed sensor. The fabricated sensor is subjected to measurement and subsequent comparison with analogous designs from the literature. The outcomes reveal a sensitivity of 0.3pF/g and cross-axis sensitivity of 0.048%, signifying a noteworthy advancement for surface micromachined accelerometers. Notably, this design, coupled with the devised topology optimization methodology, holds the potential for adoption by sensor manufacturers for diverse commercial applications.