Abstract
This paper investigates the design constraints and possibilities given when designing a micromechanical band pass filter for intermediate frequencies (e.g. 10 MHz). The class of filters are based on coupled clamped-clamped beams constituting an H-shaped structure. A primary beam can electrostatically be activated in one of its different harmonic modes, setting the filter center frequency. The motion is transferred to an accompanying beam of equal dimensions by a mechanical coupling beam. The placement or coupling points of the quarterwavelength coupling beam which connects the vertically resonating beams is critical with respect to the bandwidth of the filters. Of special concern has been to investigate realistic dimensions allowing the filters to be processed by an actual foundry process and to find out how the choice of materials and actual dimensions would affect the performance.
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