Abstract

The photo-induced vapor phase assisted surface polymerization (photo-VASP) technique was developed to achieve designed fine 2D and 3D patterns on solid surfaces. When used with pre-patterned photo-masks, photo-VASP, via polymer accumulations, reproduced pre-patterns on glass plate, Si-wafer, and Au-plate surfaces. Patterns from covalently bonded polymer were achieved with immobilized photo initiators. Moreover, a multi-layered 3D pattern was also made of block copolymer chains grafted from the surfaces.

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