Designed 3D Dumpling‐Shaped Femtosecond Laser Structured Light Field for Nanoscale Sensing

Abstract

AbstractNanoscale optical sensing plays a crucial role in achieving high‐precision non‐contact distance and displacement measurements. As one of the promising alternatives, structured light can greatly simplify optical sensing systems. In this study, a novel optical phenomenon of a structured beam called the “Dumpling‐shaped Structured Light Field” (DSLF) is revealed, which forms during the focusing of cylindrical lens beams. The 3D DSLF comprises two mutually perpendicular primary and secondary foci, offering unique possibilities in micro/nano processing and sensing applications. A thorough investigation of the DSLF is conducted, revealing a correlation between the secondary foci and the phase status at the objective lens's entrance pupil. The propagation of DSLF under tight focus conditions has been verified and discussed through methods of femtosecond laser two‐photon polymerization and light field analysis. Finally, thanks to the unique 3D intensity distribution of 3D DSLF, the applicability of DSLF in high‐precision position and vibration sensing has been demonstrated. By detecting the horizontal and vertical dimensions of the reflected DSLF, position and vibration sensing is achieved with a Z‐direction accuracy of 10 nm (λ/80). This research contributes to understanding structured light, and offers practical applications in various fields, including micro/nano laser processing, optical imaging, sensing, etc.