Design Study of a Large-Angle Optical Scanning System for MEMS LIDAR

Yajun Pang,Meiling Yao,Zhenxu Bai,Youchun Sun,Kai Zhang

doi:10.3390/app12031283

Abstract

MEMS-based LIDAR has the advantages of fast-scanning, simple structure, small volume, and light weight, which make it a hot topic for 3D imaging. In order to overcome the limited scanning angle of the current MEMS mirrors, a large angle MEMS-based optical scanning system was designed using telephoto structure. In this design an f-θ lens group is used for flat field scanning and a symmetrical cemented lens group is used for angle expansion. The principle of this system is discussed in detail and an optical design is implemented by ZEMAX software. The designed system realized a scanning angle as large as 57° and is in excellent linear relation with the tilt angle of the MEMS mirror. At the target distance of 100 m, the maximum RMS radius of the light spot is only 7 cm. This optical scanning system shows a significant application potentiality for 3D imaging LIDAR.

Highlights

In recent years, in the fields of environmental monitoring, engineering inspection, unmanned driving, military surveying and mapping, the detection demand of imagingLIDAR has grown rapidly, and these applications have made the new generation of imagingLIDAR gain widespread attentions [1,2,3,4,5,6]
Due to microelectronics, mechanical and optical technologies, and uses a drive circuit to achieve the high resonant frequency of MEMS mirror, which is above 200 Hz, the scanning angle the desired field of view (FOV)
Detection requirements the high resonant frequency of MEMS mirror, which is above 200 Hz, the scanning angle is for imaging LIDAR.◦ An auxiliary optical system must be used to extend its field of view usually within ±10, which cannot meet the large field of view detection requirements for

Summary

Introduction

In the fields of environmental monitoring, engineering inspection, unmanned driving, military surveying and mapping, the detection demand of imaging. OPA LIDAR is of solid-state scanning form with no internal mechanical drive structure It uses array laser sources and works by the principle of multiple beams interference. Due to microelectronics, mechanical and optical technologies, and uses a drive circuit to achieve the high resonant frequency of MEMS mirror, which is above 200 Hz, the scanning angle the desired field of view (FOV). Detection requirements the high resonant frequency of MEMS mirror, which is above 200 Hz, the scanning angle is for imaging LIDAR.◦ An auxiliary optical system must be used to extend its field of view usually within ±10 , which cannot meet the large field of view detection requirements for [19,20,21].

Schematic diagram of MEMS

Results and Discussion

Conclusions