Abstract
Polymethyl methacrylate (PMMA) was chosen to fabricate highly sensitive tunneling sensors due to its extremely low cost and quick machining by hot embossing. The structure of an all-PMMA-based membrane vertical tunneling sensor platform was synthesized by ANSYS. The system characteristics and feedback system were evaluated with MatLab SimuLink. The first all-PMMA-based membrane tunneling transducers were produced by hot embossing replication with silicon masters. The fabricated tunneling sensors have presented a tunneling barrier height of 0.17 eV, a sensitivity of 26 V/g, and a dynamic range of 1.5 mg, which demonstrated competitive performances with lower cost, lighter weight, and easier fabrication processing.
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