Abstract
In this paper, Nano Electromechanical Switch (NEMS) was designed and simulated by using MATLAB simulation, then was tested by on-line test through bias super-position. This switch has 4.5 nm thickness, offers low power dissipation and permits nonstop observing of all essential jobs. On the other hand, there are some challenges facing this Nano system. One of them is very difficult to resonators collective products with the same characteristics. The fabrication process was also a complex process and much hardness occurred during repetitive operations, which failure and stiction caused problems.
 In this work, a comparison between the response of a fault-free system and the system with some failures has been carried out. The test results showed a decrease in pull-in voltage with increasing overlap area as a result of wear failure mechanism in Nano Switch (NS). Creep in (NS) affected the value of the young modules and this increased the output voltage, also the crack in the beam of (NS) increased the effective mass and decreased output signal.
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