Abstract
Microcantilevers are extensively used in Micro Electro Mechanical Systems for a variety of sensing applications. This study presents the modeling, design and simulation of piezoresistive microcantilevers with an embedded heater based on Multi User MEMS Process. Simulations were carried out for the heater, microcantilever and the piezoresistor using a commercially available Finite Element Solver. Electro-thermal analysis of the embedded heater showed >75% temperature uniformity on the microcantilever surface. It was observed that the deflection of the microcantilever tend to become nonlinear with load at elevated temperatures. Piezoresistive simulation showed an increase in sensitivity (ΔI/I), with displacement magnitude of the microcantilever. Fabricated microcantilevers showed that the piezoresistor stayed nearly at ambient temperature up to 5 V heater bias.
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