Design, Simulation, and Analysis of Micro/Nanoelectromechanical System Rotational Devices

A R Kalaiarasi,D Subbulekshmi,S Angalaeswari,T Deepa,Raja Kathiravan,Lakshmipathy R

doi:10.1155/2021/6244874

A R Kalaiarasi, D Subbulekshmi + Show 4 more

Open Access

https://doi.org/10.1155/2021/6244874

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Abstract

This work is focused on design and simulation of microelectromechanical system (MEMS)/nanoelectromechanical system (NEMS) rotational devices such as micro/nanothermal rotary actuator and micro/nanogear. MEMS/NEMS technologies have allowed the development of advanced miniaturized rotational devices. MEMS/NEMS-based thermal actuator is a scaled version of movable device which will produce amplified motion when it is subjected to thermal forces. One of the applications of such thermal micro/nanoactuator is integrating it into micro/nanomotor that makes a thermal actuated micro/nanomotor. In this work, design and simulation of micro/nanothermal rotary actuator are done using MEMS/NEMS technology. Stress, current density, and temperature analysis are done for microthermal rotary actuator. The performance of the device is observed by varying the dimensions and materials such as silicon and polysilicon. Stress analysis is used to calculate the yield strength of the material. Current density is used to calculate the safer limit of the material. Temperature analysis is used to calculate the melting point of the material. Also, in this work, design and simulation of microgear have been done. Micro/nanogears are devices that can be used to improve motion performance. The essential is that it transmits rotational motion to a different axis.

Highlights

MEMS technology is a representation of microscopic implementations of sensors and actuators which are fabricated using microfabrication techniques
Stress analysis is conducted to find the deformation of microthermal rotary actuator for the given pressure
Normal pressure for the stress analysis is about 7 GPa which is the yield strength of the silicon material and 8.4 GPa for poly silicon

Summary

Introduction

MEMS technology is a representation of microscopic implementations of sensors and actuators which are fabricated using microfabrication techniques. MEMS/NEMS-based devices are fabricated using IC fabrication techniques along with special techniques to fabricate three dimensional (3D) structures It has high precision and high aspect ratio. The experimental and simulation results of six different actuator designs are compared. Investigating the static and transient response of the thermal actuator at different excitation frequency and voltage, the simulated and measured data are compared. Heo and Kim [3, 4] designed a robust to maximize the actuator deflection with respect to applied voltage and baseline design by the topology optimization method. Potekhina and Wang [16] designed hot and cold arm type actuators where differential thermal expansion is achieved by various geometrical shapes like changing beam shape, modifying electrical parameters like selective doping, modified resistance, or topological parameter changes like multimode or bidirectional operation.

Importance of Microthermal Rotary Actuator

Types of Microthermal Rotary Actuator

Theoretical Analysis

Results and Discussion

Conclusion