Abstract
Electrostatic stepping micromotors have been designed with regard to low rotor friction on the axle. The design rules are determined using two-dimensional FEM calculations and taking into consideration the particular rotor position during motion. The motors are fabricated by a fully integrated LIGA process. The minimum driving voltages needed are measured to be about 60 V. Determination of the coefficients of friction in operation completes the rules for future designs.
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