Abstract
Here we report a highly sensitive single-axis membrane-type paper accelerometer. The accelerometer is consisted of a suspended parallel-plate sensing capacitor prepared by cost-effective nano ink printing technologies on a flexible paper substrate. The proof mass and suspension bridge structures of the accelerometer are designed based on the simulation results for the optimization of sensitivity. Vertical acceleration sensitivity of the optimized design with long ellipse-shaped bridges and round-shaped proof mass can reach 20 fF/g at z-axis acceleration of 1–10 g.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
