Design optimization of machinery mounting systems with an elastic support structure

Abstract

An elastic support-based optimization model is developed for a machinery mounting system comprising a vibrating machine supported on an elastic structure by multiple resilient mounts. This model is used to investigate the design optimization of an X−Y motion stage mounting system used in microelectronics wire-bonding equipment. By varying the stiffness coefficients of the resilient mounts while constraining the dynamic displacement amplitudes of the X−Y motion stage, the total force transmitted from the X−Y motion stage (the vibrating machine) to the equipment table (the elastic support structure) is minimized at each frequency interval in the frequency range of interest for different stiffnesses of the equipment table. The results show that, when the equipment table is relatively flexible, the total transmitted force minimized by the model developed is significantly lower than that minimized using a conventional rigid support-based optimization model at some critical frequency. When the equipment table is sufficiently rigid, both models provide almost the same predictions of the total transmitted force.