Abstract
With the purpose of designing the extreme ultraviolet polarizer with many objectives, a combined application of multi-objective genetic algorithms is theoretically proposed. Owing to the multi-objective genetic algorithm, the relationships between different designing objectives of extreme ultraviolet polarizer have been obtained by analyzing the distribution of nondominated solutions in the four-dimensional objective space, and the optimized multilayer design can be obtained by guiding the searching in the desired region based on the multi-objective genetic algorithm with reference direction. Compared with the conventional method of multilayer design, our method has a higher probability of achieving the optimal multilayer design. Our work should be the first research in optimizing the optical multilayer designs in the high-dimensional objective space, and our results demonstrate a potential application of our method in the designs of optical thin films.
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