Abstract
Abstract: Nano/Micro-electro-mechanical-system (NEMS/MEMS) consists of couplings of electrical and mechanical components within the micro-scale. Their nonlinear working state makes their analysis complex and complicated. Compliant mechanisms can (CMs) achieve a specified motion as a mechanism without relying on the use of joints and pins. They have broad application in precision mechanical devices and Nano/Micro-electro-mechanical-systems. Compliant mechanisms are suggested as alternates for simplification of assembly and for miniaturization. The design synthesis of compliant mechanisms yields optimized topologies that combine several stiff parts with highly elastic flexural hinges. In this paper, Finite Element Analysis (FEA) analysis and design of a compliant micro-gripper compliant mechanism with parallel movement arm are presented by employing its Pseudo Rigid Body Model (PRBM), which leads to the establishment of high performance mechanism. This micro-gripper is capable of delivering high precision and fidelity manipulation of micro objects. The mechanism adopts a flexure-based concept on its joints to address the inherent nonlinearities associated with the application of conventional rigid hinges.
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