Abstract

We proposed a zoom homogenizer that can control the size of the illumination field by adding one lens array to the conventional imaging-type beam homogenizer. An equivalent lens system was used to derive the imaging condition and size of the illumination field. The result of the ray-tracing simulation shows the validity of the zoom homogenizer to generate the uniform and sharp-edged beam. We presented the strengths and weaknesses of the zoom homogenizer in terms of its etendue with the maximum acceptance angle of the system.

Highlights

  • A beam homogenizer, which is one of the beam-shaping methods, has been researched and developed

  • The nonimaging type consists of a single lens array (LA) and a single condenser lens (CL) [Fig. 1(a)]

  • Because the shape of the lenslets produces the shape of the illumination field at the image plane,[2] we have configured zoom homogenizer with the LAs, which have square-shaped lenslets in the simulation as a design example

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Summary

Introduction

A beam homogenizer, which is one of the beam-shaping methods, has been researched and developed. The zoom function changes the irradiated image size so the energy fluence or radiant intensity can be adjusted.[7] The real-time control of these will be practical or useful in some situations.[8] The conventional beam homogenizer can change the image size by moving the position of the lens array (LA). There have been various studies by adding zoom function in beam homogenization technique to overcome this problem. We proposed a zoom homogenizer that can produce a sharp-edged beam at all zoom positions and have a fixed image plane. It was designed by adding an LA to the conventional beam homogenizer.

Derivation of Illumination Field Size According to Zoom Positions
Ray-Tracing Simulation
Pros and Cons of the Proposed System
Conclusion

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