Abstract
ABSTRACT A slot microring resonator acoustic sensor (MRAS) using the PDMS package was proposed to achieve ultra-high sensitivity acoustic detection. The acoustic detection principle of the sensor is analyzed theoretically, the structural parameters are optimized and the performance of the sensor is verified by simulation. The simulation results show that the proposed slot MRAS has a high-quality factor of 1.49 × 106, the sensitivity of the sensor by intensity detection method is up to 3872 mV/kPa, and the 3 dB bandwidth is 210 MHz. The sensor designed in this paper has the advantages of ultra-high sensitivity and wide bandwidth range, which has important value in the field of acoustic detection.
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