Abstract

Silicon nitride coated nanowire arrays have been investigated as an efficient antireflection structure for silicon solar cells. The minimum average reflectance could reach 1.62% under AM1.5 spectrum. Scattering effects of silicon nanowire arrays also result in enhanced absorption in the substrate, and analytical results show that the scattered light can be well trapped in silicon substrate when the back surface is passivated by silicon dioxide. This ultra-low surface reflection property combined with light trapping effect may have potential applications in silicon solar cells with thin substrate.

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