Abstract

This paper proposes the electronic heart sound sensor, based on the piezoresistive principle and MEMS (Micro-Electro-Mechanical System) technology. Firstly, according to the characteristics of heart sound detection, the double-beam-block microstructure has been proposed, and the theoretical analysis and finite element method (FEM) simulation have been carried out. Combined with the natural frequency response of the heart sound (20~600 Hz), its structure sizes have been determined. Secondly, the processing technology of the microstructure with the stress concentration grooves has been developed. The material and sizes of the package have been determined by the three-layer medium transmission principle. Lastly, the MEMS piezoresistive electronic heart sound sensor has been tested compared with the 3200-type electronic stethoscope from 3M (São Paulo, MN, USA). The test results show that the heart sound waveform tested by the MEMS electronic heart sound sensor are almost the same as that tested by the 3200-type electronic stethoscope. Moreover, its signal-to-noise ratio is significantly higher. Compared with the traditional stethoscope, the MEMS heart sound sensor can provide the first and second heart sounds containing more abundant information about the lesion. Compared with the 3200-type electronic stethoscope from 3M, it has better performance and lower cost.

Highlights

  • Auscultation is an important routine examination method in clinical diagnosis

  • When the MEMS electronic heart sound sensor is at work, the mass block of the microstructure can be approximately seen as a rigid body, which is mainly used to detect heart sound signals

  • This study reveals a new attempt to implement MEMS technology and acoustic sensor This study reveals a new attempt to implement MEMS technology and acoustic sensor technology technology in the traditional auscultation field of medicine

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Summary

Introduction

Auscultation is an important routine examination method in clinical diagnosis. Before the nineteenth century doctors could only put the ear on the patient’s chest for “direct auscultation”. The clinically valuable heart sound frequency range is often concentrated in the range of 20~600 Hz, so some important heart sounds with low frequency and small intensity are difficult to capture [3,4]. The traditional stethoscope has been replaced by the heart sound electronic auscultation system, Sensors 2016, 16, 1728; doi:10.3390/s16111728 www.mdpi.com/journal/sensors. The traditional stethoscope has been replaced by the heart sound electronic auscultation system, which has thehas advantages of highofaccuracy, real-time waveform display, ease ofease use,oflow which the advantages high accuracy, real-time waveform display, use,cost, low and cost,small and volume. This paper electronic heart sound sensor with awith high asignal-to-noise ratio andratio realThis paperproposes proposesanan electronic heart sound sensor high signal-to-noise time waveform display based on technology and the piezoresistive principle. Further clinical experience, preliminary can be by the electronic sensorsound and the accuracy of heart attack diagnosis can be improved. Heart sensor and the accuracy of heart attack diagnosis can be improved

Design
Overall
Sensitive microstructureofofthe the MEMS
L 12 L 8
Simulation
Coupling
Stress
Fabrication
Package
14 ZZ1 Z Z2
Z1 Z 2
Conclusions
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