Abstract

In order to improve the accuracy of silicon piezoresistance pressure sensor under different temperatures, temperature compensation should be carried out. A temperature compensation system of pressure sensors is presented. The structure, hardware and software design of the system are introduced. In the hardware design, MAX1452 is used as the main compensation unit. A curve fitting algorithm based on cubic B-spline is adopted in the temperature compensation software design. The accuracy and the production efficiency of the sensors are improved. The system features in low cost, high efficiency and high accuracy. And it has great spreading value.

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