Abstract
In this study, tantalum copper (TaCu) alloy coating was designed and fabricated by the chemical vapor deposition (CVD) method, while the process was explored through COMSOL Multiphysics software. The influence of deposition temperature on coating quality was studied in combination with our previous work. In addition, the galvanic corrosion behavior of TaCu coating in Hank’s solution was simulated through this software. The COMSOL Multiphysical software can be used to simulate the process that TaCu coated on the surface of titanium(Ti) alloy substrate by chemical vapor deposition. The deposition quality was affected by the direction of the deposition airflow. Cu ion dissolution makes the coating thickness decrease uniformly, Cu ion dissolution accelerates due to galvanic corrosion, and the antibacterial ability of the coating can be improved due to Cu ion dissolution.
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