Abstract

Step-index optical waveguides have been obtained by means of silver ion implantation on fused silica substrates. Step index profiles have been reached using a sequential multiple ion implantation process with energies of implantation from 4.3 to 9 MeV and fluences of 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">14</sup> -10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">15</sup> ions/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> . Optical absorption spectra, propagation losses, intensity distribution, and effective refractive indices of the propagation modes of the waveguides are presented. An approach of refractive index profile of ion-implanted waveguides was fitted as function of polarizability, compaction, and stress.

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