Abstract
Investigations of microactuators are actively being pursued in various viewpoint, researchers are exploring output energy sources such as electrostatic, piezoelectric, electromagnetic and etc. We focus attention recently on the electromagnetic microactuator. In generally, electromagnetic actuator is not well suited to miniaturization because of decreased output force when miniaturized. However, we have already developed 3D-LIGA process to produce a spiral microcoil in 2003. Then, the production process of a smaller and higher output force microactuator was devised based on this technology.
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