Abstract
RuO 2-based thick film resistors (TFRs) were designed for use as low temperature thermometers in the millikelvin temperature range. The R- T characteristics and sensitivities of these thermometers below 1 K are comparable with germanium thermometers usually used in this temperature range. However, their low electrical resistance and their sensitivity are opposing properties which put certain technological limitations on their design. The temperature dependence of the resistance of RuO 2 sensors at the lowest temperatures investigated can be adequately described in terms of a variable-range hopping mechanism.
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