Abstract
Micro Electro Mechanical Systems (MEMS) vector sensor is a recent advancement in the field of underwater acoustic sensors. The major incentive provided by this acoustic vector sensor is that it provides information about the direction of the incoming acoustic source signal in addition to the measurement of the pressure associated with the acoustic signal. We are reporting a design of a MEMS acoustic vector sensor for underwater applications using piezoresistive film of Reduced Graphine Oxide (RGO), realized on kapton (polyimide) film as the starting material. The sensor is designed and fabricated by deposition of RGO on a kapton, which is a flexible substrate by the method of drop casting making the process simple, low-cost and scalable. The application of the piezoresistive transduction principle and ingenious structure of the vector sensor based on bionic principle improves miniaturization and the low-frequency sensitivity. The fabricated sensor shows a repeatable response in both static and dynamic conditions, to the applied strain due to the acoustic signal in a given direction. The experimental results show that fabricated sensor based on MEMS technology and piezoresistive effect is feasible and it possesses intrinsic two-dimensional directivity. The fabricated device has given good response for the low-frequency acoustic signals due to the effect of piezoresistive transduction principle and the resonance frequency of the device is found to be around 80 Hz with the displacement sensitivity around 3 mV/mm and 2 mV/mm of X and Y axis directions respectively.
Highlights
As sound wave is an effective means of disseminating and transmitting information in nature for underwater operations, underwater acoustic acts as the main means of target identification, navigation and communication [1]
In order to detect these low-frequency signals, single vector acoustic sensor based on bionic principle, piezoresistive principle and Mechanical Systems (MEMS) technology was developed by North University of China [5]
An attempt is made to design and develop a biologically inspired two-dimensional acoustic vector sensor based on MEMS technology and piezoresistive transduction principle, which is suitable for underwater applications
Summary
As sound wave is an effective means of disseminating and transmitting information in nature for underwater operations, underwater acoustic acts as the main means of target identification, navigation and communication [1]. As in recent years the noise radiated by submarine has reduced drastically, the application of acoustic vector sensor effectively suffices the requirement of submarine sound detection. This device can obtain the pressure of the sound and direction of the sound field simultaneously [3]. In order to detect these low-frequency signals, single vector acoustic sensor based on bionic principle, piezoresistive principle and MEMS technology was developed by North University of China [5]. An attempt is made to design and develop a biologically inspired (fish cilia) two-dimensional acoustic vector sensor based on MEMS technology and piezoresistive transduction principle, which is suitable for underwater applications. Combining the advantages of both MEMS technology and piezoresistive effect of RGO with unique electronic properties has great significance, as it results in simple, low cost and scalable process
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