Design of planar comb-driven MEMS torsional mirror

Abstract

The MEMS torsional mirror is an important MEMS optical device, and its related applications are very wide, including LiDAR, projection equipment, optical communication, and so on. At present, the electrostatically driven MEMS torsional mirror mainly adopts a vertical comb driver to achieve torsional motion, which has some disadvantages such as a complicated manufacturing process, low yield, and high driving voltage. In this paper, a novel MEMS torsional mirror structure is proposed, which provides flexible elastic constraint points for the torsional mirror with the bottom support rod structure as the center, and relies on the combination of planar comb and support rod to form a tie rod structure to achieve torsion, and achieves a torsion Angle of ±15.55° under the driving voltage of 65 V. The use of a planar comb instead of a vertical comb greatly reduces the difficulty of manufacturing. Finally, it is verified that the system stability is good, the correlation drift does not affect the results within the range, the fifth-order modes are within the reasonable range, and the maximum stress is 671 MPa, which is controlled within the range of fracture stress of silicon material.