Design of novel tunable resonant cavity enhanced photodetector (RCE-PD)

Abstract

A novel tunable resonant cavity enhanced photodetector (RCE-PD) is achieved by using an air gap. The optical properties of the photodetector are designed by using the transfer matrix method (TMM). The quantum efficiency (QE) of the tunable RCE-PD is calculated and the optimizing structure is obtained. It is revealed that the peak QE increases to the highest value ( 92%) when the thickness of active layer is 106nm. When the air layer thickness changed 20nm under a low bias voltage, the peak wavelength blue shifts from 1550nm to 1547.9nm and the QE of the device keeps almost invariant at the same time.