Abstract
For the miniaturisation of the terahertz detector with on-chip antenna, the slotted patch antennas in different shape are studied. Through analysing and comparing of the antennas in rectangle, circular and diamond shape, with and without slot, the double arc slots and diagonal slots are proposed for the circular patch antenna and the diamond patch antenna, respectively, which can increase the current path to reduce the size of the patch antenna effectively. The optimised radius of the circular patch antenna is 130 μm and the diagonal of the diamond patch antenna is 207.2 μm, whose size is reduced about 12 and 40%, respectively. Fabricated in Taiwan Semiconductor Manufacturing Company (TSMC) 0.18 μm standard complementary metal oxide semiconductor (CMOS) process, the N Metal Oxide Semiconductor (NMOS) detector with proposed antenna has the response frequency ranging from 270 to 320 GHz. For the detector 1 with circular antenna and detector 2 with diamond antenna, the maximum response voltage is 419 and 110 μV at the frequency of 290 and 280 GHz, respectively.
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