Design of micro-displacement amplifier for the micro-channel cooling system in the micro-pump

Abstract

With the characteristic of small size, lightweight, low energy dissipation, the laminated piezoelectric is suitable for micro-electromechanical system, which still needs an external amplification mechanism because of its low output displacement. As for the application of the micro-channel cooling system in the micro-pump, the leveraged mechanism, the bridge mechanism and the hydraulic mechanism have been proceed numerical modeling, dynamic simulation and optimizing in this paper. In this study, the amplifier is designed within the volume of 15 mm × 15 mm × 5 mm. The volume of the leveraged mechanism, the bridge mechanism and the hydraulic mechanism are 345 mm3, 1125 mm3 and 240.21 mm3 respectively. Moreover, the best magnification and frequency for the above three magnifying mechanisms are 134.8 and 69.4 Hz, 61.52 and 5.26 kHz, 50.6 and 6.94 kHz respectively. The performance of a micro-pump is a combination of the output quantity per time and the output frequency. Compared to other two magnifying mechanisms, the hydraulic mechanism is smaller, more stable and faster in response. Taking into consideration all these above factors, the hydraulic mechanism is more suitable for the micro-pump used in a micro-channel cooling system. The hydraulic micro-displacement amplifying mechanism also can be used in developing tools for other fields such as medicine, chemistry and so on.