Abstract
This paper presents the theoretical design and analysis of a tunable Fabry–Perot resonant microcavity filter realized by movable-waveguide-based integrated optical MEMS technology in InP. Wide-bandwidth, high-reflectivity horizontal InP/air-gap distributed bragg reflector (DBR) mirrors monolithically integrated with the waveguides have been proposed. The filter can be tuned by moving one of the high-reflectivity mirrors axially with on-chip MEMS electrostatic actuation. Spectral performance of the filter is numerically simulated taking into account the diffraction effects. Finite element mechanical modeling of the parallel-plate capacitive microactuator, consisting of a micromachined suspension beam and fixed electrodes, predicts a wide wavelength tuning range (1250–1650 nm) achievable by low actuation voltage (<7 V).
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