Design of MEMS gyroscope interface ASIC with on-chip temperature compensation

Abstract

Zero bias and scale factor are important overall performance indicators for micromechanical gyroscopes and are commonly used to describe the temperature stability of MEMS gyroscope. This article presents a mode-matched MEMS gyroscope interface Application Specific Integrated Circuit (ASIC) with on-chip temperature compensation, which improves the temperature adaptability of the gyroscope by means of temperature compensation. By establishing a mathematical model between the equivalent integration constant of the driving loop and the temperature, the relationship between the phase margin of driving loop and temperature is analyzed. The effect of sense loop control parameters on the bandwidth of the gyroscope system is investigated, and the influence law between bandwidth and loop gain of the sense circuit is verified. A temperature compensation method based on an on-chip virtual temperature sensor is presented, and the design principle with an on-chip temperature compensation interface ASIC is described. The experimental results show that the standard deviation of scale factor in the temperature range of −40 to 60 °C is reduced to 11.2% of that before compensation, and the standard deviation of the zero bias is reduced to 2.5%. The zero bias instability of the gyroscope is reduced from 4.6 to 1.9°/h of that before compensation.