Abstract
With the rapid development of MEMS technology, MEMS acceleration sensors have been used more and more widely due to their unique advantages. Taking MEMS acceleration sensor as the core device, a measurement memory system was designed. The system mainly included acceleration detection module, acceleration memory module and control display module, which could realize real-time acceleration measurement and memory, and uploaded the stored data to the computer. Using the vibration test to detect the performance of the system, the result showed that the system could achieve the desired effect, and could realize real-time acceleration measurement and memory within the allowable error range. It could still work normally under the condition of the maximum overload of at least 100g, which possessed strong resistance to high overload capacity
Highlights
The MEMS (Micro Electro-Mechanical System) technology refers to a microfabrication process, which integrates micro-sensors, micro-actuators, micro-motion mechanisms, signal detection circuits, and control execution circuits, even power, interfaces, and communications[1].The rapid development of integrated circuits and processing technology have promoted the rapid popularization and promotion of MEMS technology
The process of combining data, which consisted of micro inertial measurement based on MEMS acceleration sensors, was simple, intuitive, reliable
In the design of indoor navigation systems, the acceleration sensor was the core sensitive device, which had the characteristics of low cost and small size [7]; In the field of high-overload penetrating munitions, high-g-value accelerometers had been successfully developed in many aspects, and the maximum overload could reach 200000 g
Summary
The MEMS (Micro Electro-Mechanical System) technology refers to a microfabrication process, which integrates micro-sensors, micro-actuators, micro-motion mechanisms, signal detection circuits, and control execution circuits, even power, interfaces, and communications[1].The rapid development of integrated circuits and processing technology have promoted the rapid popularization and promotion of MEMS technology. The process of combining data , which consisted of micro inertial measurement based on MEMS acceleration sensors, was simple, intuitive, reliable This process did’t have to change the structure of the missile structure, which was of great significance for expanding the scope of its application [3]. Successfully developed in many aspects, and the maximum overload could reach 200000 g Using this accelerometer could achieve the penetration depth control, which would be greatly promoted in drilling munitions [8]. application range of the acceleration sensor was expanding, due to the limitation of the technical level, practical application which used MEMS acceleration sensor as the core design still remains low [9,10]. It was of great practical significance to combine the MEMS and sensors in the online engineering design
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