Abstract
Mechanical properties of MEMS materials is one of MEMS important basic theory research, including hardness, elastic modulus, yield strength, tensile strength, fatigue strength and other performance indicators. For the acquisition and processing of weak signal can meet the system, this paper designs a measurement and control system which has a common set of software and hardware of high speed, high accuracy, high reliability in one. This tester is mainly composed of four parts: precision positioning subsystem, specimen clamping subsystem, load/displacement measurement subsystem and measuring and controlling subsystem, which provides a solid foundation in higher positioning accuracy of measuring MEMS materials and benefits more for further research.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
