Abstract

AlN is a promising candidate for photonic integrated circuits. In this study, horizontally stacked transverse quasi‐phase‐matched (QPM) waveguides with an AlN center core and Si3N4, Ta2O5, and TiO2 side cores were designed to generate squeezed light at 920 nm. The squeezing level was calculated by considering the propagation loss at the wavelengths of the squeezed light and pump light. Using TiO2 for the side cores enhanced the electric field amplitude of the pump light in the AlN center core, and a high nonlinear coupling coefficient was obtained. Owing to the small propagation loss of the AlN waveguide on sapphire and high nonlinear coupling coefficient of the transverse QPM with TiO2 side cores, a squeezing level of over 8.1 dB was expected with a 1 cm long waveguide and pump power of 70 mW.

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