Abstract
Imprint lithography technique is introduced in this paper. Imprint tool is one of the key steps of imprint lithography process. In consideration of the fact that the imprint process control is performed in room temperature, replicating patterns is realized by press system and the nanometer positioning driving system of imprint tool is illustrated. Combine ball screw with PZT, Macro-Micro two-level control is accomplished. The developed imprint tool is characterized by simple structure, low cost and the ability of replica with different feature sizes. The several results of imprint are exhibited.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
