Abstract
In order to improve the accuracy and efficiency of fabricating lines with laser pattern generator, a novel focusing system was designed. Focusing system is based on optical off-axis detection principle. The detector is a two-quadrant photocell and the defocus signal is constructed by division. Focusing system has the character of second-order system with overdamp. The new embedded PID controller improves the performance of focusing system and upgrades the closed-loop precision to 0.2 μm. Furthermore focusing system has the fabrication capabilities for alterable-width lines under various defocus amount.
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