Design of FBAR Filter Chip Based on Space Mapping Optimazation Algorithm

Abstract

Space mapping optimization algorithm is used to convert the inefficient and accurate method of fine physical model into an efficient method, which combines equivalent circuit coarse model and fine model. In this paper, space mapping optimization algorithm is applied to design and optimize FBAR filter chip, which combines the accurate fine model of multi-physical field electro-mechanical coupling simulation and the inaccurate coarse model of Mason equivalent circuit. Firstly, the principle and process of space mapping algorithm are introduced. Then, the proposed method is adopted to build the fine model of multi-physical field electro-mechanical coupling algorithm based on finite element algorithm in COMSOL. Secondly, the FBAR filter course model of Mason equivalent circuit is given. Finally, the proposed method is utilized to design a one-order FBAR filter in the paper.