Abstract
The objective of this work is to design electrostatic actuators for a CMOS-MEMS nano-newton capacitive force sensor to suppress vertical vibrations disturbances. Electrostatic actuators are selected because the movable part of this force sensor is anchored to the fixed parts. In the first step, we propose a framework for simulation of the force sensor based on finite element method. The proposed model is modified utilizing comparison between the simulation and experimental models to improve the performance of the model. Then, 14 pairs of electrostatic actuators are designed for applying the control algorithm and their pull-in voltage is calculated. In next step, Modal Analysis is applied to find dominant natural frequencies and mode shape vectors. In addition, an observer is proposed to estimate the velocity of the modal coordinate. Finally, an optimal controller is designed employing state-space approach to suppress vertical vibration due to undesired out-of-plane excitations generated by environment during manipulation. Simulation results illustrate that employing optimum LQR control approach, the maximum out-of-plane disturbance input is suppressed less than 0.4 s with acceptable range of voltage less than pull-in voltage.
Highlights
MEMS force sensing devices play an important role in sensitive applications such as living cell manipulation and minimally invasive surgery (MIS)
This paper has addressed the performance of a new CMOS-MEMS nano-newton capacitive force sensor using a finite element method technique
14 pairs of electrostatic actuators which were categorized in seven groups were designed to suppress vertical disturbances generated by environment during manipulation
Summary
MEMS force sensing devices play an important role in sensitive applications such as living cell manipulation and minimally invasive surgery (MIS). Determining forces accurately is the key point to independently manipulate vulnerable biological cells and maintain safety during manipulation. R.J. Mozhdehi et al.: Mechanics & Industry 16, 306 (2015). This force sensor can measure forces ranged in nano scale which can be useful for bio application. CMOS-MEMS technology is used to fabricate this force sensor that causes better integration of the sensor with manipulator. The most important characteristics of being capacitive are relatively high sensitivity and low temperature dependence [7]
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