Design of dynamic error detection system for grating scale

Abstract

Grating scale is a closed-loop detection and control tool for precision machine tools, and its accuracy detection needs a higher precision detection platform. There are two kinds of commonly used detection platform guideways: sliding guideway and rolling guideway. Because of the contact of points or lines, the error caused by the guideway itself is obvious. In order to reduce the error of the platform itself, the air-floating guideway with small friction resistance and no vibration relative to the motion is used as the support mode, and the air pressure is debugged according to the smoothness of sliding. The static accuracy detection method of grating sensor is comparatively mature, but there is no effective solution for its dynamic accuracy detection. To solve this problem, we developed a dynamic error detection system of grating scale based on high-precision grating scale. The experimental results show that the system can detect the dynamic accuracy of grating scale, and has high detection efficiency. It is suitable for mass rapid measurement in practical work.