Abstract
In this paper, a displacement sensor with an electrically extremely small size and high sensitivity is proposed based on an elaborately designed metamaterial element, i.e., coupled split-ring resonators (SRRs). The sensor consists of a feeding structure with a rectangular opening loop and a sensing structure with double-layer coupled SRRs. The movable double-layer structures can be used to measure the relative displacement. The size of microwave displacement sensors can be significantly reduced due to the compact feeding and sensing structures. By adjusting the position of the split gap within the resonator, the detection directions of the displacement sensing can be further expanded accordingly (along with the x- or y-axis) without increasing its physical size. Compared with previous works, the extremely compact size of 0.05λ0 × 0.05λ0 (λ0 denotes the free-space wavelength), a high sensitivity, and a high quality factor (Q-factor) can be achieved by the proposed sensor. From the perspective of the advantages above, the proposed sensor holds promise for being applied in many high-precision industrial measurement scenarios.
Highlights
The two-part are connected to the two layers of the sensor respectively
Thereby the relative displacement of the two substrates of the sensor can be generated by the accurate one-dimension movement of the computer numerical control (CNC) displacement table
A microwave displacement sensor with an electrically small size based thisofpaper, a microwave sensor with an electrically small size based on theInshift resonant frequency displacement has been designed, fabricated, and tested
Summary
The use of metamaterials in sensors has attracted great attention from the scientific community. The subwavelength-size characteristic of metamaterial elements is conducive to the integration and miniaturization of sensors. Owing to these advantages, metamaterials-based sensors have been developed rapidly, and their applications are becoming more and more diversified, including biological component sensor [1], gas concentration sensor [2], liquid content sensor [3], angular displacement sensor [4,5,6], displacement sensor [7,8,9,10,11,12,13,14,15], and permittivity sensor [16]
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