Design of Cleanroom Airflows for Particle Control Using CFD Analysis: Case Studies

Abstract

This paper describes two case studies involving the use of Computational Fluid Dynamics (CFD) analysis for evaluating the designs of significantly different types (and cleanliness classes) of cleanrooms: a class 10 unidirectional flow and a class 1000 mixed flow. Initial concerns regarding the suitability of the designs and the preliminary findings resulting from the CFD analysis were effectively addressed and resolved through this technique.