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Abstract
Conventional seismometers use coil as the main sensor. Coil is relatively cheap, but in order to cover low frequency range, it becomes frail and has inappropriate a sampling rate. To overcome the limitation of conventional seismometers we use a MEMS sensor. The sensor is made from glass and silicon substrate which has no harmonic frequency characterization. It enables covering wide bandwidth with low frequency cover and high sampling rate response with high sensitivity. The usage of MEMS in electronics such as disk drive heads and inkjet printer heads. MEMS sensor also is used in different domains which include medical, automotive, communications and defence. This paper described a borehole seismometer that was composed of a MEMS accelerometer colibrys 1500SN. An arduino micro controller. Based on data calibration and physical simulation, MEMS sensor offers the potential to reduce costs while improving data quality.
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