Abstract
A design of a beam homogenizer which consists of kaleidoscope and lens optics is described. The beam intensity uniformity of ±8% and the pattern edge sharpness of 0.1mm were obtained with the excimer laser beam homogenizer constructed with the low spherical aberration (<10μm) imaging lens and the kaleidoscope carefully designed with a beam uniformity simulation code.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
