Abstract

Symmetric micro-gripper mechanism is very easy way to destroy the micro-components or parts for nonuniform force in the processing of micro-assembly. Aiming at the requirements of micro-assembly for the microtubule (diameter of 0–200 μm) components, a new type of asymmetric flexible micro-gripper mechanism based on flexure hinges was designed and studied. The asymmetric micro-gripper mechanism was driven by piezoelectric actuator, whose output displacement was amplified and transmitted by flexure hinges, and the flexible parallel four-bar mechanism was used to ensure that the micro-clamp moves and is held parallel. The displacement amplification ratio of the asymmetric flexible micro-gripper mechanism was deduced theoretically, and the finite element analysis and the experiment were also carried out to study the displacement amplification ratio in detail. The experiment results show that the displacement amplification ratio of the asymmetric flexible micro-gripper mechanism is 4.16, compared with the finite element analysis result and the theoretical calculation result; the error between them is 1.89% and 5.67%, respectively. The experiment results also show that the step-wise resolution of the micro-gripper is 7.50 μm, and the output force of the right micro-clamp was measured at 0.28 N. The asymmetric flexible micro-gripper mechanism is able to perform the micro-assembly tasks for the microtubule parts, and it is helpful to design this type of micro-gripper mechanism.

Highlights

  • As a result of the development of microelectromechanical systems (MEMS), precision machinery processing, and manufacturing technology, more and more microcomponents and parts are produced, and these microcomponents and parts could only be assembled in the micro-assembly system

  • The new type of micro-gripper based on flexure hinges, which is driven by piezoelectric actuator, has obtained widespread interest and research in recent years because of the fact that this type of micro-gripper has distinct advantages, such as no mechanical friction, high precision, and fast response

  • According to the finite element analysis (FEA) simulation result k = 4.24, if the piezoelectric ceramic actuator is suitable and the output displacement Din is in the range of 0–50 mm, the micro-gripper mechanism could carry out the micro-assembly task for the microtubule components in the diameter range of 0–200 mm

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Summary

Introduction

As a result of the development of microelectromechanical systems (MEMS), precision machinery processing, and manufacturing technology, more and more microcomponents and parts are produced, and these microcomponents and parts could only be assembled in the micro-assembly system. According to the FEA simulation result k = 4.24, if the piezoelectric ceramic actuator is suitable and the output displacement Din is in the range of 0–50 mm, the micro-gripper mechanism could carry out the micro-assembly task for the microtubule components in the diameter range of 0–200 mm. In the processing of the experiment, the driven power was first adjusted to output different voltage, and different displacement Din was generated by the piezoelectric ceramic actuator when it was driven by a different voltage, and the movement of the right micro-clamp was formed by the output displacement Dout after amplifying and transmitting by the asymmetric micro-gripper mechanism. When the piezoelectric ceramic actuator is driven by a maximum power 150 V, the output displacement of the asymmetric micro-gripper mechanism is 249.38 mm, which is large enough to perform the micro-assembly task of clamping the microtubule components in the diameter range of 0–200 mm. The microtubule components are not damaged in the processing of clamping of the asymmetric micro-gripper, because only one side of the micro-gripper is movable and there is one output force to be controlled instead of two output force

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