Abstract
A pair of grating couplers with apodized structure, sandwiched by metal mirrors, was proposed for inter-layer coupling between multilayer waveguides based on hydrogenated amorphous silicon (a-Si:H). We proved theoretically that the introduction of an apodized grating coupler yields a high coupling efficiency of about 90% even for an inter-layer distance of several micrometers. In addition, this high coupling efficiency was obtained for a large bandwidth by adjusting the grating period.
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