Design of an osmotic pressure sensor for sensing an osmotically active substance

Abstract

A pressure sensor based on the osmosis principle has been designed and demonstrated successfully for the sensing of the concentration levels of an osmotically active substance. The device is fabricated using the bulk micro-machining technique on a silicon on insulator (SOI) substrate. The substrate has a square cavity on the bottom side to fill with the reference glucose solution and a silicon (Si) membrane on the top side for the actuation. Two sets of devices, having membrane thicknesses of 10 µm and 25 µm, but the same area of 3 mm ×3 mm, are fabricated. The cavity is filled with a glucose solution of 100 mg dL−1 and it is sealed with a semi-permeable membrane made up of cellulose acetate material. The glucose solution is employed to prove the functionality of the device and it is tested for different glucose concentration levels, ranging from 50 mg dL−1 to 450 mg dL−1. The output voltage obtained for the corresponding glucose concentration levels ranges from −6.7 mV to 22.7 mV for the 10 µm device and from −1.7 mV to 4 mV for the 25 µm device. The device operation was simulated using the finite element method (FEM) and the finite volume method (FVM), and the simulation and experimental results match closely. A response time of 40 min is obtained in the case of the 10 µm device compared to one of 30 min for the 25 µm device. The response times obtained for these devices are found to be small compared to those in similar works based on the osmosis principle. This pressure sensor has the potential to provide controlled drug delivery if it can be integrated with other microfluidic devices.