Design of an Optimal PID Controller by Genetic Algorithms for a Pantograph Type XY Platform

Abstract

This study focused on the development of an intelligent motion control system for a nanoscale micro-platform based on the pantograph mechanism. The platform is designed to satisfy the need for achieving high accuracy and process efficiency in the manufacture of increasingly small industrial products. The target platform is mounted on a pantograph and small x-y sliders, and is driven by a traditional X-Y platform with common precision. The goal of this study is to drive the target platform to move in the region of 20mm × 20mm for the positioning, and repeatedly positioning accuracy error is less than 800 nm by a traditional X-Y platform. Due to the different PID parameters will affect platform positioning accuracy and system response for the two axes, the optimal PID parameters by the Genetic algorithms was proposed. The simulation and experimental results indicated that the proposed method is feasible for development of an intelligent motion control system for the nanoscale micro-platform positioning.